NANOscientific

Lyncée Tec Acquisition Brings Holographic Microscopy to Park's Portfolio

In a strategic move to broaden its metrology portfolio, Park Systems Corp. announced the acquisition of Swiss-based Lyncée Tec SA, a pioneer in Digital Holographic Microscopy (DHM). This acquisition follows Park’s 2022 integration of Accurion GmbH, positioning the company as a provider of complementary nanometrology technologies across AFM, Imaging Spectroscopic Ellipsometry, and now holographic microscopy.

Founded in 2003 by researchers at EPFL in Lausanne, Lyncée Tec developed DHM to acquire 3D surface data across an entire field of view at high speed—over 100 times faster than conventional interferometry. The technology serves a wide range of industries including semiconductors, life sciences, MEMS, and materials manufacturing.

“This acquisition is a pivotal step toward becoming an equipment company with a comprehensive suite of semiconductor metrology solutions,” said Dr. Sang-il Park, CEO of Park Systems. Integration plans include building a fully automated DHM system that complements Park’s AFM platforms, particularly for advanced packaging applications.

Founders of Lyncée Tec expressed confidence that joining Park Systems will enhance DHM’s visibility and broaden its impact in global markets, leveraging Park’s commercial infrastructure and international reach.

New Tools Bridge Research and Industry Needs

At SEMICON Korea 2025, Park Systems unveiled major additions to its FX Large Sample AFM series: the Park FX300, FX200 IR, and FX300 IR. Designed to address the semiconductor industry's transition to 300 mm wafers, the FX300 offers high-precision measurement without the complexity of a full inline system. It is suited for both industrial quality control and advanced research environments.

A key innovation is the integration of Photo-induced Force Microscopy (PiFM) in the FX200 IR and FX300 IR models, enabling nanoscale infrared (IR) spectroscopy with high spatial resolution. This allows chemical identification of nanoscale features without damaging wafer surfaces, opening applications in semiconductor analysis, polymers, and biomaterials.

The systems also include automation features like StepScan, AI-based laser alignment, automatic tip exchange, and cleanroom-compatible options with Fan Filter Units (FFUs). These capabilities aim to streamline workflows while maintaining high resolution and reproducibility.

“The FX Large Sample AFM series represents the convergence of industrial robustness and research-grade performance,” said Dr. Sang-Joon Cho, EVP at Park Systems. “With the new nano-IR systems, we’re redefining how large-sample AFM can serve both research and production needs.”

Interactive Platform Brings AFM Workflows Online
Park Systems has introduced SmartSimulator™, a virtual demonstration platform that enables remote users to explore AFM operation workflows. Announced during a global online showcase of the FX Large Sample AFM series, SmartSimulator is part of Park’s broader strategy to support digital access and early-stage customer engagement.

Users can simulate key steps such as probe handling, scan setup, laser alignment, and data analysis through a browser-based interface. The tool includes 2D and 3D data visualization modes and replicates the experience of operating Park AFM tools in real lab settings—without needing the physical instrument.

By providing interactive access to AFM technology, SmartSimulator enables prospective users to evaluate capabilities remotely. It also supports workflow development for SmartAnalysis™ post-scan processing.

The virtual platform was demonstrated alongside live sessions in multiple languages during the showcase, where researchers discussed semiconductor and materials applications across Asia, Europe, and the Americas.

Company representatives indicated that SmartSimulator will be a cornerstone in Park Systems’s expanding digital toolkit.

For more information, visit www.parksystems.com