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Keynote Speaker

Dr. Yves Emery

General Manager, Lyncée Tec SA, Switzerland

3D time-resolved topography and MEMS analysis by DHM

 

Digital Holography Microscopes (DHM) measure topography of samples without any lateral, vertical, or phase scanning. All the pixels of the field of view are recorded simultaneously. 

This allows the response of samples to various stimuli, whether electrical, mechanical, chemical, thermal, photonic, or other, to be characterized in real time. The acquisition frequency is the same as the camera frame rate. DHMs are compatible with high speed cameras, and stroboscopic synchronization enables measurements of MEMS at frequencies up to 25 MHz.

As the information is acquired within a very short time, DHMs are very robust against external perturbations and vibrations. They are ideal tools for automated quality control on the production floor, and on-flight measurements.

The measurement principle and several application examples will be presented during this presentation to explain and illustrate these unique features in the world of interferometric profilometry.