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UC Berkeley | Physics

Dr. Eric Y. Ma

Pushing the Limits of Microwave Impedance Microscopy: Toward High-Precision, Quantitative, and Multimodal Nanoscale Imaging

Abstract

Microwave impedance microscopy (MIM) has emerged as a powerful tool for non-contact, nanoscale mapping of local electronic properties. In this talk, I will present a series of recent advances from our group that transform MIM into a high-precision, multi-modal measurement tool. We have established a quantitative framework for MIM responsivity and calibration, enabling rigorous interpretation of both conventional and transmission-mode imaging. Leveraging a novel cancellation-free circuit architecture and monolithic silicon cantilever probes, we achieved thermal-noise-limited sensitivity down to 0.26 zF/√Hz with spatial resolution of 15 nm. I will also discuss new multimodal extensions, including photoconductivity nano-interferometry with 20 pm optical spectral resolution, broadband microwave impedance spectroscopy with continuous frequency tuning, resonant distance spectroscopy mode, and nonlinear operation. Together, these developments position MIM as a high-precision metrological platform for probing complex electronic phenomena in both conventional and quantum materials.

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