『半導体デバイス用シリコンウェーハの表面制御』
グローバルウェーハズ・ジャパン㈱ 技術部基盤技術グループ所属。1999年、新潟大学自然科学研究科物理学修士課程修了。同年、東芝セラミックス㈱（現グローバルウェーハズ・ジャパン㈱）入社。2008年、兵庫県立大学大学院物質理学研究科博士課程を修了（博士（理学））。半導体デバイス用シリコンウェーハの、評価解析技術、熱処理技術、およびエピタキシャル成長技術の開発に従事。
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